1.
Hezarjaribi Y, Yari Esboi M, Azizollah Ganji B. Simulation of high sensitivity MEMS capacitive pressure sensor with small size and clamped square diaphragm. MJTD [Internet]. 31May2016 [cited 22May2022];5(2). Available from: http://journals.iaumajlesi.ac.ir/td/index/index.php/td/article/view/333