Design and analysis of a novel MEMS capacitive tire pressure sensor with high sensitivity and linearity

  • Maryam Norouznejad Jelodar
  • Bahram Azizollah Ganji

Abstract

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output. First the structures of two capacitive pressure sensors with clamped square flat diaphragms, with different thicknesses are investigated and their sensitivity and non-linearity are compared together. Finally for increasing the sensitivity and linearity, a new capacitive pressure sensor with a stepped diaphragm is introduced. A numerical solution for determination of the accurate sensitivity of the sensor is presented. The results show that the sensitivity of the sensor is increased from 0.063 fF/KPa with flat diaphragm to 0.107 fF/KPa with stepped diaphragm and also the non-linearity is decreased from 2.37% to 1.857%. In this design, the sensor sensitivity and output linearity are increased simultaneously.

References

-A. Preethi and L. Chitra, “Comparative Analysis of Materials for the Design of a highly Sensitive Capacitive Type of MEMS Pressure Sensor,” IEEE National Conference, pages 1-8, 2014.
-Ch. Wei, W. Zhou, Q. Wang, X. Xia and X. Li, “TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer,” Microelectronic Engineering, Volume 91, Pages 167-173, March 2012.
-M. G. Michael Paine and N. Magedara,“The Role of Tyre Pressure in Vehicle Safety, Injury and Environment,” Road Safety Solutions, 2007.
-B. Tian, Y. Zhao, Zh. Jiang , L. Zhang, N. Liao, Y. Liu and Ch. Meng, “Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS),” Sensors, 9, 1382-1393, 2009.
-Deepika, M. Mittal and A. Sharma, “Virtual prototyping of a MEMS capacitive pressure sensor for TPMS using Intellisuite”, IEEE Conference Publications, Pages25 – 28, 2012.
-National Highway Traffic Safety Administration, ,Tire Pressure Monitoring Systems, Federal Motor Vehicle Safety Standards, 49 CFR Parts 571 and 585, 2005.
-M. J. Sharifi, N. Nemati and A. Abedi, “A New MEMS Based Capacitive Differential Pressure Sensor with Acceptable Sensitivity and Improved Linear Region,” The 22nd Iranian Conference on Electrical Engineering, Pages 29-32, 2014.
-G. Meng and W. H. Ko, “Modeling of circular diaphragm and spreadsheet solution programming for touch mode capacitive sensors,” Sensors & Actuators, A 75, Pages 45-52, 1999.
-Y. Hezarjaribi, M. N. Hamidon, R. M. Sidek, and S. H. Keshmiri, “Analytical and Simulation Evaluation for Diaphragm’s Deflection and its Applications to Touch Mode MEMS Capacitive Pressure Sensors,” vol. 3, no. 4, pp. 4281–4292, 2009.
-S. Plrte, “Simulation Program for Solid-state Pressure Sensors,” no. 1, pp. 34–41, 1982.
-W. P. Eaton and J. H. Smith, “Micromachined pressure sensors: review and recent developments,” Smart Mater. Struct., vol. 6, no. 5, pp. 530–539, Oct. 1997.
-SujaK J, E Surya Raveendran and R. Komaragiri, “Investigation on better Sensitive Silicon based MEMS Pressure Sensor for High Pressure Measurement,” International Journal of Computer Applications, Volume 72– No.8, Pages 40-47, May 2013.
-R. Khakpour, Solmaz R. M. Mansouri and A.R. Bahadorimehr, “Analytical Comparison for Square, Rectangular and Circular Diaphragms in MEMS Applications,” International Conference on Electronic Devices, Systems and Applications, Pages 297-299, 2010.
-Q. Wang and W. H. Ko, “Modeling of touch mode capacitive sensors and diaphragms,” Sensors and Actuators 75, Pages 230–241, 1999
-M. Shahiri-Tabarestani, B. A. Ganji and R. Sabbaghi-Nadooshan, “Design and Simulation of High Sensitive Capacitive Pressure Sensor with Slotted Diaphragm,” International Conference on Biomedical Engineering, Pages27-28 February 2012.
-B.A. Ganji and B.Y. Majlis, “Analytical analysis of flat and corrugated membranes for MEMS capacitive sensors,” Int J Nonlinear Dynamics EngSci., Pages47–57, 2008.
-J.H. Jermam, “The fabrication and use of micromachined corrugated silicon diaphragms,” Sens Actuators A21- A23:988–992, 2001.
-R. Kressmann and M. Mlaiber, “Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes,” Sens Actuators A 100:301–309, 2002.
-N. Soin and B.Y. Majlis, “An analytical study on diaphragm behavior for micromachined capacitive pressure sensor,” Proceeding of the IEEE International Conference on Semiconductor Electronics Penang, Malaysia, pp.505-510, December 2002.
-B. A. Ganji and M. Shams Nateri, “A high sensitive MEMS capacitive fingerprint sensor using slotted membrane,” Microsyst Technol 19:121–129, 2013.
-A. Sharma, "Modeling of Pull-in Voltage and touch-point pressure for MEMS capacitive transducer with square diaphragm," Kurukshetra University, Kurukshetra Ph.d Thesis, Pages 376-382, 2008.
-M. Damghanian and B. Y. Majlis, “Design of a High Sensitivity Structure for MEMS Fingerprint Sensor,” SM IEEE Institute of Micro engineering and Nano electronics, pp.177-184, 2006.
Published
2016-05-31
How to Cite
Norouznejad Jelodar, M., & Azizollah Ganji, B. (2016). Design and analysis of a novel MEMS capacitive tire pressure sensor with high sensitivity and linearity. Majlesi Journal of Telecommunication Devices, 5(2). Retrieved from http://journals.iaumajlesi.ac.ir/td/index/index.php/td/article/view/328
Section
Articles